Electrochemical micromachining: An environmentally friendly, high speed processing technology
Electrochemical micromachining: An environmentally friendly, high speed processing technology
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DOI：
10.1016/s0013-4686(97)00147-3
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发表时间：
1997-01-01
影响因子：
6.6
通讯作者：
Harris, D
中科院分区：
文献类型：
--
作者：
Datta, M;Harris, D
湿法化学蚀刻工艺用于制造各种微电子部件。这些工艺使用的蚀刻剂通常含有腐蚀性和有毒化学品，产生危险废物，分辨率有限。电化学金属去除是一种不断发展的替代加工技术，涉及通过外部电流控制金属成形，从而需要更少的侵蚀性和无毒的电解质。在微结构和微部件的制造中应用受控的电化学金属去除被称为电化学微加工（EMM）。本文讨论了最近发展起来的一种用于金属掩模制作的电解金属加工工艺和工具。EMM的性能进行比较，通过传统的化学蚀刻工艺。所获得的结果证明了EMM提供的机会，特别是作为一种高速，环保的加工技术。(C)1997年由Elsevier Science Ltd.出版
Wet chemical etching processes are employed in the manufacturing of a variety of microelectronic components. These processes use etchants that generally contain aggressive and toxic chemicals, generate hazardous waste and have limited resolution. Electrochemical metal removal is an evolving alternate processing technique that involves controlled metal shaping by an external current, thereby requiring less aggressive and nontoxic electrolytes. The application of controlled electrochemical metal removal in the fabrication of microstructures and microcomponents is referred to as electrochemical micromachining (EMM). In this paper a recently developed EMM process and tool for metal mask fabrication is discussed. EMM performance is compared to that obtained by the conventional chemical etching process. Obtained results demonstrate the opportunities offered by EMM particularly as a high-speed, environmentally friendly processing technology. (C) 1997 Published by Elsevier Science Ltd.