Experimental characterization and mitigation of specimen charging on thin films with one conducting layer

Experimental characterization and mitigation of specimen charging on thin films with one conducting layer
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DOI:
10.1017/s143192760404067x
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发表时间:
2004-12-01
影响因子:
2.8
通讯作者:
Glaeser, RM
Glaeser, RM
中科院分区:
工程技术4区
文献类型:
--
作者:
Downing, KH;McCartney, MR;Glaeser, RM

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