Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining
Distribution of shallow NV centers in diamond revealed by photoluminescence spectroscopy and nanomachining
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DOI：
10.1016/j.carbon.2020.04.086
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发表时间：
2020-04
期刊：
影响因子：
10.9
通讯作者：
M. Fazeli Jadidi;H. Özer;S. Goel;J. Kilpatrick;N. McEvoy;D. McCloskey;J. Donegan;G. Cross
中科院分区：
文献类型：
--
作者：
M. Fazeli Jadidi;H. Özer;S. Goel;J. Kilpatrick;N. McEvoy;D. McCloskey;J. Donegan;G. Cross
利用纳米加工技术结合光致发光光谱技术，研究了低能氮离子辐照金刚石表面形成的氮空位中心的深度分布。NV -和nv0荧光信号在原子力显微镜（AFM）中由金刚石针尖逐步加工的表面收集，最初在5 nm深度上升到最大值，然后在10 nm深度返回到背景水平。该最大值与利用每个氮原子2.5 keV注入能量的SRIM模拟预测的缺陷深度分布相对应。完全熄灭注入产生的NV -和nv0声子线峰出现在超过10 nm的加工深度，与表面材料易于去除的结束和尖端明显磨损的开始相一致。与单晶金刚石尖端相比，NV活性离子辐照金刚石的磨损比惊人地达到了22:1。报告的结果构成了首次通过包含浅形成NV中心的金刚石表面的光学特性对原位加工和磨损特性进行综合研究。我们讨论了金刚石工具在精密制造中可能的计量应用。
We performed nanomachining combined with photoluminescence spectroscopy to understand the depth distribution of nitrogen-vacancy (NV) centers formed by low energy nitrogen ion irradiation of the diamond surface. NV−and NV0fluorescence signals collected from the surface progressively machined by a diamond tip in an atomic force microscope (AFM) initially rise to a maximum at 5 nm depth before returning to background levels at 10 nm. This maximum corresponds to the defect depth distribution predicted by a SRIM simulation using a 2.5 keV implantation energy per nitrogen atom. Full extinguishing of implantation produced NV−and NV0zero phonon line peaks occurred beyond 10 nm machining depth, coinciding with the end of easy surface material removal and onset of significant tip wear. The wear ratio of for NV active, ion irradiated diamond compared to the single-crystal diamond tip was surprisingly found to be 22:1. The reported results constitute the first integrated study of in-situ machining and wear characterization via optical properties of the diamond surface containing shallow formed NV centers. We discuss possible metrology applications for diamond tools used in precision manufacturing.