Modal optimization and filtering in piezoelectric microplate resonators
Modal optimization and filtering in piezoelectric microplate resonators
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DOI：
10.1088/0960-1317/20/5/055027
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发表时间：
2010-05
影响因子：
2.3
通讯作者：
J. Sánchez-Rojas;J. Hernando;A. Donoso;J. C. Bellido;T. Manzaneque;A. Ababneh;Helmut Seidel;Ulrich Schmid
中科院分区：
文献类型：
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作者：
J. Sánchez-Rojas;J. Hernando;A. Donoso;J. C. Bellido;T. Manzaneque;A. Ababneh;Helmut Seidel;Ulrich Schmid
给出了一种基于压电薄膜柔性板的微谐振器的系统设计方法。通过优化平面尺寸的表面电极形状，设计了传感器/执行器。将覆盖压电膜的有效表面电极视为各单元上的二元函数，实现了数值有限元程序。考虑了两个设计目标：(I)在给定模式下的优化响应(激励或传感)；(Ii)通过对特定模式进行滤波来实现模式换能器。对于具有任意边界条件的板中的给定模式，我们的计算允许我们预测顶部电极布局在共振中达到比相同结构的任何其他电极设计更高的位移。制作了微悬臂梁和微桥，并用激光多普勒测振仪对它们的模态响应进行了表征。与传统的正方形电极相比，我们的实验表明，通过简单地对表面电极进行整形，所实现的设计可以在任何想要的谐振模式下增加响应，同时衰减来自其他不想要的模式的贡献。相对于全尺寸电极盒，增强比高达42分贝。文中还讨论了制造过程中的局限性。
A systematic design procedure to tailor the modal response of micro-resonators based on flexible plates with piezoelectric films is demonstrated. Sensors/actuators were designed by optimizing the surface electrode shapes in the plane dimensions. A numerical finite element procedure, which considers the effective surface electrode covering the piezoelectric film as a binary function on each element, has been implemented. Two design goals are considered: (i) optimized response (actuation or sensing) in a given mode; (ii) implementation of a modal transducer by filtering specific modes. For a given mode in a plate with arbitrary boundary conditions, our calculations allowed us to predict the top electrode layout reaching higher displacement in resonance than any other electrode design for the same structure. Microcantilevers and microbridges were fabricated and their modal response characterized by laser Doppler vibrometry. In comparison to a conventional square-shaped electrode, our experiments show that the implemented designs can increase the response in any desired resonant mode and simultaneously attenuate the contributions from other unwanted modes, by simply shaping the surface electrodes. Enhancement ratios as high as 42 dB, relative to a full-size electrode case, are demonstrated. The limitations imposed by the fabrication are also discussed.