Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor
Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor
复制标题
热解聚合物作为二氧化氮传感器的吸收剂
DOI：
10.1109/memsys.2006.1627850
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
S. Konishi
中科院分区：
文献类型：
--
作者：
K. Naka;T. Hashishin;J. Tamaki;S. Konishi
本文讨论了热解聚合物作为一种由聚合物热裂解得到的碳材料。通过聚合物的微加工和随后的裂解工艺相结合，我们可以获得用于各种应用的裂解聚合物MEMS结构。本论文主要研究热解聚合物作为二氧化氮传感器的吸收剂。当传感器暴露在NO2混合气体中时，传感器的电阻显著降低。通过对热解温度和工作温度的依赖关系的评价，发现较高的热解温度和较高的工作温度有助于提高对NO2气体混合物的敏感性。
This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through the combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on pyrolyzed polymer as an absorbent of nitrogen dioxide sensor. The resistance of the developed sensor was dramatically decreased when the sensor was exposed to the NO2mixture gas. Through evaluations of dependence on pyrolysis temperature and operating temperature, it is found that higher pyrolysis temperature and higher operating temperature contribute to higher sensitivity against gas mixture of NO2.