An enhanced quasi-monolithic integration technology for microwave and millimeter wave applications
An enhanced quasi-monolithic integration technology for microwave and millimeter wave applications
复制标题
适用于微波和毫米波应用的增强型准单片集成技术
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
H. Hillmer
中科院分区：
文献类型：
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作者：
M. Joodaki;G. Kompa;H. Hillmer
介绍了一种在低成本硅衬底上集成高频有源器件的新工艺。新的制造工艺提供了优异的优点，如极低的热阻，和更低的热机械应力比早期的准单片集成技术（QMIT）的概念。这大大提高了有源器件的封装寿命和电气特性。该工艺简单，可用于高Q值无源器件的制作。首次成功地将高Q值无源元件集成在低电阻率硅衬底上。与QMIT的早期概念相比，该技术中空气桥的消除不仅减少了寄生元件，而且在测量了嵌入式有源器件的微波特性之后还能够制造电路的其余部分。这使得非常精确的微波和毫米波设计成为可能。使用新的制造工艺，微波和毫米波电路（共面和微带线）包含功率器件首次成为可能。此外，增强的QMIT可以被认为是一个有机沉积的多芯片模块（MCM-D），这是一个潜在的候选人集成系统上的封装（SOP）在微波和毫米波频率。
A new technology for integration of high frequency active devices into low cost silicon substrate has been introduced. The novel fabrication process gives excellent advantages such as extremely low thermal resistance, and a much lower thermo-mechanical stress than the earlier quasimonolithic integration technology (QMIT) concept . This highly improves the packaging lifetime and electrical characteristics of the active devices. The fabrication process is simple and compatible with fabrication of high-Q passive elements. Successful integration of high-Q passive elements on low resistivity silicon substrate in this technology has been possible for the first time. In comparison to the earlier concept of QMIT, elimination of air-bridges in this technology not only reduces the parasitic elements but also enables the fabrication of the rest of the circuit after measuring the microwave characteristics of the embedded active devices. This makes very accurate microwave and millimeter-wave designs possible. Using the new fabrication process, microwave and millimeter-wave circuits (with both coplanar and microstrip lines) containing power devices have for the first time been possible. Furthermore, the enhanced QMIT can be considered as an organic deposited multi chip module (MCM-D), which is a potential candidate for integration an system on a package (SOP) at microwave and millimeterwave frequencies.