ANISOTROPIC ND-FE-B THIN-FILM MAGNETS FOR MILLI-SIZE MOTOR
ANISOTROPIC ND-FE-B THIN-FILM MAGNETS FOR MILLI-SIZE MOTOR
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DOI：
10.1063/1.349879
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发表时间：
1991-11-15
影响因子：
3.2
通讯作者：
IWABUCHI, N
中科院分区：
文献类型：
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作者：
YAMASHITA, S;YAMASAKI, J;IWABUCHI, N
研究了在低衬底温度下获得各向异性薄膜磁体的方法。这是实际应用的一个重要标准，比如制造马达。研究了衬底材料和薄膜厚度对c轴取向的影响。结果表明，选择三元相图中Nd13Fe76B11 ~ Nd13Fe70B17线附近的成分，可以在450℃左右的衬底温度下沉积易磁化轴与薄膜平面垂直的薄膜磁体。发现各向异性薄膜磁体也可以沉积在金属衬底上。随着膜厚的增加，c轴取向趋于各向同性。在直径为5毫米的硅钢盘片衬底上沉积20 μ m厚的Nd-Fe-B薄膜制备了毫米级电机，该电机在转速为3000转/分时的转矩为0.8 g mm。
Efforts were made to obtain anisotropic thin-film magnets at low substrate temperature. This is an important criterion for practical applications such as to build motors. The influence of substrate materials as well as film thickness on the c-axis orientation were studied. It has been shown that thin-film magnets with the easy axis of magnetization normal to the film plane could be deposited at a substrate temperature of around 450-degrees-C by choosing the composition near the line from Nd13Fe76B11 to Nd13Fe70B17 in the ternary phase diagram. It was found that the anisotropic film magnets could be also deposited on the metallic substrate. The c-axis orientation tended to be isotropic with an increase in film thickness. The obtained results were used to fabricate a milli-size motor by depositing 20-mu-m-thick Nd-Fe-B films on a silicon steel disk substrate of 5-mm diam. The milli-size motor exhibited a torque of 0.8 g mm at a rotational speed of 3000 rpm.