Tactile microsensor elements prepared from aligned superelastic carbon microcoils and polysilicone matrix
Tactile microsensor elements prepared from aligned superelastic carbon microcoils and polysilicone matrix
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DOI：
10.1088/0964-1726/15/3/003
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发表时间：
2006-06-01
影响因子：
4.1
通讯作者：
Motojima, S.
中科院分区：
文献类型：
--
作者：
Yang, Shaoming;Chen, Xiuqin;Motojima, S.
用镍催化乙炔热解制备了直径为10-15 μ m的高弹性超弹性碳微线圈（SE-CMC）。SE-CMC可以伸展和收缩至其原始线圈长度的5-10倍;这些效应伴随着电参数的变化。大体积SE-CMC片材的延伸对施加的载荷高度敏感，并且可以响应于毫克量级的非常低的施加载荷。以SE-CMC为敏感材料，有机硅树脂为复合基体，制备了不同取向的触觉传感元件。发现传感器元件具有1 mgf（1 Pa）的高灵敏度。获得的SE-CMC微传感器元件的最小尺寸为80 × 80 × 80 μ m（3）（传感器非常小，最小可检测力难以测量）。还发现基质中的SE-CMC排列和电极上的放置方法显著影响传感特性。
Superelastic carbon microcoils (SE-CMC) with coil diameters of 10-15 mu m and high elasticity were prepared by the Ni catalysed pyrolysis of acetylene. The SE-CMC could be extended and contracted to 5-10 times their original coil length; these effects accompanied changes in electrical parameters. The extension of the bulk SE-CMC sheets was highly sensitive to the applied load, and could respond to very low applied loads of the order of milligrams. Using the SE-CMCs as the sensing material and polysilicone resin as the composite matrix, tactile sensor elements with different alignments were prepared. It was found that the sensor elements had the high sensitivity of 1 mgf (1 Pa). The smallest dimensions of the SE-CMC microsensor elements obtained were 80 x 80 x 80 mu m(3) (the sensor was very small and the smallest detectable force was hard to measure). It was also found that the SE-CMC alignments in the matrix and the method of placement on the electrodes dramatically affected the sensing properties.