X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source
X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source
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DOI：
10.1524/zkri.2007.222.11.650
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发表时间：
2007-01-01
影响因子：
--
通讯作者：
Yun, Wenbing
中科院分区：
文献类型：
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作者：
Tkachuk, Andrei;Duewer, Fred;Yun, Wenbing
高分辨率x射线计算机断层扫描（XCT）能够对复杂结构进行非破坏性的三维成像，而不管它们的结晶度如何。这项工作描述了一个低于50 nm分辨率的XCT系统，该系统基于市售的铜旋转阳极实验室x射线源，在8 keV的吸收和泽尼克相衬模式下工作。该系统采用高效反射毛细管聚光镜和高分辨率菲涅耳带片，最外层带宽度为35 nm，结构高度为700 nm，空间分辨率优于目前的50 nm。作为XCT技术在材料科学和纳米技术中的应用实例，本文介绍了固体氧化物燃料电池（SOFC）片段50 nm分辨率的成像。
High-resolution X-ray computed tomography (XCT) enables nondestructive 3D imaging of complex structures, regardless of their state of crystallinity. This work describes a sub-50 nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast modes based on a commercially available Cu rotating anode laboratory X-ray source. The system utilizes a high efficiency reflective capillary condenser lens and high-resolution Fresnel zone plates with an outermost zone width of 35 nm and 700 nm structure height resulting in a spatial resolution better than 50 nm currently. Imaging a fragment of the solid oxide fuel cells (SOFC) with 50 nm resolution is presented as an application example of the XCT technique in materials science and nanotechnology.