Transmission phase gratings for EUV interferometry.
Transmission phase gratings for EUV interferometry.
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用于 EUV 干涉测量的传输相位光栅。
DOI：
10.1107/s0909049500010670
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发表时间：
2000
影响因子：
2.5
通讯作者：
J. Bokor
中科院分区：
文献类型：
--
作者：
P. Naulleau;C. Cho;E. Gullikson;J. Bokor
最近发展的EUV移相点衍射干涉仪（PS/PDI）的性能在很大程度上取决于在实现中使用的光栅分束器的特性。理想地，这种光栅应提供优于25%的通过量和衍射效率，衍射效率定义为第一衍射级功率与零级功率的比率，在大约10至500的范围内变化。实现这些目标的最佳方法是通过相位光栅。此外，PS/PDI系统实现问题倾向于使用透射光栅而不是反射光栅。在这里，设计，制造和表征最近开发的透射相位光栅开发用于EUV干涉测量。
The performance of the recently developed EUV phase-shifting point diffraction interferometer (PS/PDI) depends heavily on the characteristics of the grating beamsplitter used in the implementation. Ideally, such a grating should provide throughput of better than 25% and diffraction efficiency, defined as the ratio of the first-diffracted-order power to the zero-order power, variable in the range from approximately 10 to 500. The optimal method for achieving these goals is by way of a phase grating. Also, PS/PDI system implementation issues favor the use of transmission gratings over reflection gratings. Here, the design, fabrication, and characterization of a recently developed transmission phase grating developed for use in EUV interferometry is described.