Nanometer positioning of a linear motion stage under static loads
Nanometer positioning of a linear motion stage under static loads
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DOI：
10.1109/3516.686679
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发表时间：
1998-06
影响因子：
6.4
通讯作者：
B. A. Awaddy;Wu-Chu Shih;D. Auslander
中科院分区：
文献类型：
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作者：
B. A. Awaddy;Wu-Chu Shih;D. Auslander
标准丝杠驱动线性平移台配有辅助音圈致动器，可在平移台上施加 /spl plusmn/0.5 N 的力。直流伺服电机驱动的丝杠能够将工作台定位到标称精度 /spl plusmn/0.5 /spl mu/m。然后，辅助致动器将工作台定位至/spl plusmn/1 mm。两种执行器均采用闭环反馈算法。与通常使用压电致动器的更常见的“背负式”布置相比，这种配置具有显着的优点。优点包括保留原始负载表面和位置传感器以及更容易控制执行器。本文讨论了它在静载荷下运行的能力和微动力学行为的模型。当向平移台施加高达 36 N 的静载荷时，辅助执行器仍然可以将工作台位移至 /spl plusmn/500 nm，并将位置控制至零载荷精度。该区域的微动力学行为是非线性的，并使用修正的达尔摩擦模型进行建模。模型中的关键参数是使用来自次级执行器的具有不同幅度的 2 Hz 正弦输入力来确定的。对于恒定的加载力，参数随着不同的激励力没有显着变化。与摩擦力与位移曲线的初始斜率相关的摩擦参数确实随着不同的加载力而变化。此外，对于导致位移小于 200 nm 的较小输入信号，摩擦参数往往会漂移，具体取决于输入幅度。
A standard lead-screw-driven linear translation table was fitted with a secondary voice coil actuator, which can apply forces of /spl plusmn/0.5 N on the translating stage. The DC servomotor-driven lead screw is capable of positioning the table to a nominal precision of /spl plusmn/0.5 /spl mu/m. The secondary actuator then positions the table to /spl plusmn/1 mm. Both actuators utilize closed-loop feedback algorithms. This configuration has significant advantages over the more common "piggyback" arrangement, which often uses piezoelectric actuators. The advantages include preservation of the original load surface and position sensors and an easier to control actuator. Its ability to operate under static load and a model of the microdynamic behavior are addressed in this paper. When static loads of up to 36 N were applied to the translating stage, the secondary actuator could still displace the table to /spl plusmn/500 nm and control the position down to its zero-load precision. The microdynamic behavior in this region is nonlinear and was modeled using the modified Dahl model of friction. The key parameters in the model were identified using a 2 Hz sinusoidal input force with varying amplitudes from the secondary actuator. For a constant loading force, the parameters did not vary significantly with different excitation forces. The friction parameter relating the initial slope of the friction force versus displacement curve did change with different loading forces. Also, for smaller input signals causing displacements of less than 200 nm, the friction parameters would tend to drift, depending on input magnitudes.