Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD
Magnesium Oxide Thin Films with Tunable Crystallographic Preferred Orientation via Aerosol-Assisted CVD
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通过气溶胶辅助 CVD 制备具有可调晶体择优取向的氧化镁薄膜
DOI：
10.1002/cvde.201507156
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发表时间：
2015
影响因子：
--
通讯作者：
Ponja S
中科院分区：
文献类型：
--
作者：
Ponja S
氧化镁薄膜通过气溶胶辅助（AA）CVD沉积在玻璃上。使用乙酸镁四水合物在乙醇或甲醇中的沉积在400、500和600 °C下进行。通过各种方法分析薄膜。生长速率，膜厚度，和微晶尺寸随温度的增加，而不管溶剂。薄膜是结晶的，晶体学优选取向随溶剂和温度而变化，允许工业应用的微调。溶剂和温度影响表面形态;与甲醇衍生膜的无特征形态相比，使用乙醇沉积的膜由小的表面结构组成。薄膜的折射率为1.72甲醇和1.70乙醇系统。
Magnesium oxide films are deposited on glass via aerosol‐assisted (AA)CVD. Depositions using magnesium acetate tetrahydrate in ethanol or methanol are carried out at 400, 500, and 600 °C. Films are analyzed by various methods. Growth rate, film thickness, and crystallite size increase with temperature, regardless of solvent. The films are crystalline and the crystallographic preferred orientation varies with solvent and temperature, allowing fine‐tuning for industrial applications. Solvent and temperature influence the surface morphology; films deposited using ethanol consist of small surface structures compared to the featureless morphology of methanol‐derived films. The refractive index of the films is 1.72 for methanol and 1.70 for ethanol systems.