Metal printing with modified polymer bonding lithography

Metal printing with modified polymer bonding lithography
复制标题

DOI:
10.1063/1.2218818
复制
发表时间:
2006-06
影响因子:
4
通讯作者:
Xinhong Yu;Shunyang Yu;Zhe Wang;D. Ma;Yanchun Han
Xinhong Yu;Shunyang Yu;Zhe Wang;D. Ma;Yanchun Han
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Xinhong Yu;Shunyang Yu;Zhe Wang;D. Ma;Yanchun Han

文献摘要

被引文献

相似文献

介绍了一种简单通用的金属薄膜图形化方法,利用聚合物与金属薄膜之间的粘附力作为驱动力。溶剂蒸气处理是通过两个反向过程来提高聚合物与金属膜之间的粘附能力。在选择性转移印刷之后,可以在聚合物膜或平坦弹性体印模上制造金属图案。该方法还可以通过多次印刷来制造多层金属图案。最后,将该方法应用于聚合物场效应晶体管的制作。讨论了溶剂对晶体管性能的影响。
A simple and versatile metal thin film patterning method is introduced, using the adhesion between polymer and metal thin film as the driving force. Solvent vapor treatment is used to increase the adhesive ability between polymer and metal film in two reverse processes. After selective transfer printing, metal patterns on polymer film or flat elastomeric stamp can be fabricated. Multilayer metal patterns can also be fabricated with this method through multiple printing. Finally, this method was used to fabricate polymer field-effect transistors. The discussions on the effects of solvent on the transistor performance have been given.