HREELS investigation of the surfaces of nanocrystalline diamond films oxidized by different processes.
HREELS investigation of the surfaces of nanocrystalline diamond films oxidized by different processes.
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不同工艺氧化的纳米晶金刚石薄膜表面的 HREELS 研究
DOI：
10.1021/la1032652
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
J.A. Schaefer
中科院分区：
文献类型：
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作者：
S. Ghodbane;T. Haensel;Y. Coffinier;S. Szunerits;D. Steinmüller-Nethl;R. Boukherroub;S. I.-U. Ahmed;J.A. Schaefer
本文报道了使用高分辨率电子能量损失谱（HREELS）的调查生长（氢终止）和氧化纳米金刚石薄膜（NCD），使用化学，物理和电化学方法。结果表明，NCD表面上产生的与氧相关的化学基团的性质和数量强烈地依赖于氧化过程。在射频氧等离子体氧化的NCD表面上获得了高浓度的C−O功能，而电化学氧化则获得了最高的C − O/C−O比。RF等离子体氧化的NCD表面完全不含C = O基团。在空气中退火或通过紫外线/臭氧氧化，可以检测到表面羟基（C−OH）的痕迹。
This article reports on the use of high-resolution electron energy loss spectroscopy (HREELS) for the investigation of as-grown (hydrogen-terminated) and oxidized nanocrystalline diamond films (NCD) using chemical, physical, and electrochemical approaches. The results indicate that the nature and number of oxygen-related chemical groups generated on the NCD surface depend strongly on the oxidation process. A high concentration of C−O functions has been obtained on the NCD surface oxidized by rf (radio frequency) oxygen plasma, whereas the highest CO/C−O ratio has been achieved by electrochemical oxidation. The NCD surface oxidized by rf plasma was totally free of CO groups. Traces of surface hydroxyl groups (C−OH) have been detected upon annealing in air or through UV/ozone oxidation.