Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability
Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability
复制标题
微加工 AlGaAs/GaAs 垂直腔滤波器，具有可调节的温度依赖性和波长微调能力
DOI：
10.1049/el:20000123
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发表时间：
2000
影响因子：
1.1
通讯作者：
K. Iga
中科院分区：
文献类型：
--
作者：
T. Amano;F. Koyama;N. Furukawa;N. Nishiyama;A. Matsutani;K. Iga
提出了一种新型的微机械垂直腔体滤光片，该滤光片具有AlGaAs/GaAs分布布拉格反射器(DBR)，可通过差热膨胀进行机械调谐。其中一个反射镜的应变引起的位移潜在地使得波长调谐和微调能够以可调节的温度依赖关系来执行。首次在微机械半导体滤光片中实现了负温度系数，证明了温度不敏感工作的可能性。此外，在器件制造完成后，还展示了>；20 nm的波长微调。
The authors present a novel micromachined vertical cavity filter which has an AlGaAs/GaAs distributed Bragg reflector (DBR), that can be mechanically tuned by differential thermal expansion. The strain-induced displacement of one of the mirrors potentially enables wavelength tuning and trimming to be carried out with an adjustable temperature dependence. A negative temperature coefficient has been achieved in a micromachined semiconductor filter for the first time, demonstrating the possibility of temperature insensitive operation. Also, wavelength trimming of > 20 nm was demonstrated after completion of the device fabrication.