Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools
Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools
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DOI：
10.1016/j.cirp.2009.03.009
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发表时间：
2009-01-01
影响因子：
4.1
通讯作者：
Arai, Y.
中科院分区：
文献类型：
--
作者：
Gao, W.;Asai, T.;Arai, Y.
测量仪器由原子力显微镜 (AFM) 和光学对准探头组成，专为精确快速测量单点金刚石微型刀具的 3D 切削刃轮廓而设计和构建。采用聚焦激光束作为 AFM 悬臂尖端与微型工具切削刃自动快速对准的参考。通过实验验证了该仪器对标称刀尖半径为1.5μm的圆鼻微型刀具的对准和测量能力。对微型刀具的切削刃锋利度、刀尖半径和刃口轮廓不圆度进行了评估。 (c) 2009 年 CIRP。
A measuring instrument, which consists of an atomic force microscope (AFM) and an optical alignment probe, is designed and constructed for precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools. A focused laser beam is employed as a reference for automatic and fast alignment of the AFM cantilever tip with the micro-tool cutting edge. Experiments are carried out to demonstrate the ability of the instrument for alignment and measurement of a round-nose micro-tool with a nominal nose radius of 1.5 mu m. The cutting edge sharpness, nose radius and edge contour out-of-roundness of the micro-tool are evaluated. (c) 2009 CIRP.