A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators
A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators
复制标题
DOI：
10.1007/s10404-010-0597-0
复制
发表时间：
2010-10-01
影响因子：
2.8
通讯作者：
Ye, Wenjing
中科院分区：
文献类型：
--
作者：
Leung, Roger;Cheung, Howard;Ye, Wenjing
Squeeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the free-molecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.
