An Aluminum Scandium Nitride (Al 0.64 Sc 0.36 N) Two-Dimensional-Resonant-Rods Delay Line with 7.5% Bandwidth and 1.8 dB Loss
An Aluminum Scandium Nitride (Al 0.64 Sc 0.36 N) Two-Dimensional-Resonant-Rods Delay Line with 7.5% Bandwidth and 1.8 dB Loss
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An%20铝%20钪%20氮化物%20(Al%200.64%20Sc%200.36%20N)%20二维谐振棒%20延迟%20线%20和%207.5%%20带宽%20和%201.8%20dB%20损耗
DOI：
10.1109/mems51670.2022.9699475
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
Cassella, Cristian
中科院分区：
文献类型：
--
作者：
Kaya, Onurcan;Zhao, Xuanyi;Cassella, Cristian
