A PDMS surface stress biosensor with optimized micro-membrane: Fabrication and application
A PDMS surface stress biosensor with optimized micro-membrane: Fabrication and application
复制标题
具有优化微膜的PDMS表面应力生物传感器：制备与应用
DOI：
10.1016/j.snb.2016.09.157
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发表时间：
2017-04-01
影响因子：
8.4
通讯作者：
Sang, Shengbo
中科院分区：
文献类型：
--
作者：
Jian, Aoqun;Tang, Xiaoliang;Sang, Shengbo
提出了一种具有精细圆形膜结构的PDMS微膜表面应力生物传感器及相应的电极设计。制备了一种具有薄层PDMS膜和层间腔的两个一体化圆电极的夹层结构，并对其进行了表征。利用表面微机械加工技术，实现了PDMS薄膜沉积和刻蚀的高精度厚度。此外，制作的微膜在操作的各个阶段都进行了表征，以验证设计的参数。在生物传感器表面涂覆一层11-巯基十一烷酸(MUA：SH-(CH2)10-COOH)后，以金黄色葡萄球菌(S.aureus)为生物分析物进行生物传感实验。反电容与细菌浓度的关系符合近似线性关系，灵敏度为4.275×10~(-2)pF(-1)bac/ml，分辨率为0.8amol/ml，在最近发展起来的电容式生物传感器中是比较优秀的。这种新型传感器显示了未来检测金黄色葡萄球菌或其他生物分析物的前景。(C)2016爱思唯尔B.V.保留所有权利。
A PDMS micro-membrane surface stress biosensor with elaborate circular membrane and corresponding electrode design is presented in this paper. A sandwich structure of two integrated circle electrodes with thin PDMS film and interlayer cavity was fabricated and characterized. Highly accurate thickness of deposition and etching of the PDMS membrane were achieved using surface micromachining technology. Furthermore, the fabricated micro-membrane has been characterized in each of the various stages of operation to verify the designed parameters. After the biosensor was coated with a layer of 11-mercaptoundecanonic acid (MUA: SH-(CH2)10-COOH), Staphylococcus aureus (S. aureus) was used as the bioanalyte in biological sensing experiments. The dependence of inverse capacitance on the concentration of bacteria follows an approximate linear relationship with a sensitivity of 4.275 x 10(-2) pF(-1) bac/ml and a resolution of 0.8 amol/ml, comparatively excellent among recently developed capacitive biosensors. The novel sensor shows promises for future detection of S. aureus or other bioanalytes. (C) 2016 Elsevier B.V. All rights reserved.