Development of a new NEG pump using oxygen-free Pd/Ti thin film
Development of a new NEG pump using oxygen-free Pd/Ti thin film
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使用无氧 Pd/Ti 薄膜开发新型 NEG 泵
DOI：
10.1063/1.5084677
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
K. Mase
中科院分区：
文献类型：
--
作者：
T. Kikuchi;T. Miyazawa;H. Nishiguchi;K. Mase
非蒸散型吸气剂（NEG）泵具有无油、无蒸发、无溅射、无升华、无磁场、无振动、经济、紧凑、重量轻、节能等优点，广泛应用于同步辐射装置中。然而，传统的NEG泵具有以下缺点：1）在重复的排气-活化循环之后降低的泵送速度; 2）相对高的活化温度（当使用ZrVFe合金时，典型地450 °C持续10分钟，并且当使用TiZrV膜时，典型地180 °C持续24小时）;以及3）需要专用电源。 为了克服这些缺点，我们开发了一种新的NEG泵，该泵具有DN 160 conflat法兰，使用新的NEG材料，即，在150 °C下烘烤12 h后，用小孔法测量NEG泵的抽速。 在第一次、第二次、第三次和第四次排气后，H2的泵速估计为500-320、370-260、400-300和310-170 L s-1。
Non-evaporable getter (NEG) pumps are widely used in synchrotron radiation facilities because they are free of oil, evaporation, sputtering, sublimation, magnetic field, and vibration as well as economical, compact, lightweight, and energy efficient. However, conventional NEG pumps have the following drawbacks: 1) decreased pumping speed after repeated venting–activating cycles; 2) relatively high activation temperature (typically 450 °C for 10 min when ZrVFe alloy is used, and typically 180 °C for 24 h when TiZrV film is used); and 3) a dedicated power supply is required. In order to overcome these disadvantages, we developed a new NEG pump with a DN 160 conflat flange using a new NEG material, i.e., oxygen-free Pd/Ti thin film, for evacuating residual H2 and CO. After baking at 150 °C for 12 h, the pumping speeds of the NEG pump were measured with the orifice method. Pumping speeds of 500–320, 370–260, 400–300, and 310–170 L s−1 were estimated for H2 after the first, second, third, and fourth venting–ac...
表面吸附氢原子渗入块体金属的机理：实验和模型
DOI：
--
发表时间：
2008
期刊：
Phys.Rev.B 78
影响因子：
--
作者：
M.Wilde;K.Fukutani
通讯作者：
K.Fukutani