Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving
Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving
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DOI：
10.1016/j.sna.2013.03.009
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发表时间：
2013-06-01
影响因子：
4.6
通讯作者：
Sasaki, Minoru
中科院分区：
文献类型：
--
作者：
Kundu, Subrata Kumar;Ogawa, Shouhei;Sasaki, Minoru
紧张的薄膜多晶（多）硅扭杆是有利的行为作为顺应弹簧对扭转运动的静电低电压驱动的微镜。在这项研究中，非线性弹簧效应的紧张薄膜多晶硅扭杆的一个电晶体的特点。从理论上解释了这种扭杆的非线性弹簧效应，并考虑了弯曲和拉伸效应以及剪应力效应。在薄膜多晶硅扭杆中引起的拉伸应力为300 - 400 MPa，并且扭杆在反射镜旋转期间保持其顺应性并增加其刚度以抑制拉入不稳定性。扭杆表现出很大的硬弹簧效应与弯曲的膜，观察到的振铃频率的增加。实验观察到弹簧常数增加了6.25倍。关于非线性弹簧常数的大小，理论结果与实验结果吻合得很好。(C)2013 Elsevier B.V.保留所有权利。
Tense thin-film polycrystalline (poly-) Si torsion bars are advantageous in behaving as compliant springs against the twisting motion of electrostatically low-voltage-driven micromirrors. In this study, the non-linear spring effect of the tense thin-film poly-Si torsion bar of a micromirror was characterised. The nonlinear spring effect of this torsion bar was explained theoretically, considering the bending and stretching effects in addition to the shear stress effect. The tensile stress induced in the thin-film poly-Si torsion bar is 300-400 MPa, and the bar maintains its compliance during the rotation of the mirror and increases its stiffness to suppress the pull-in instability. The torsion bar exhibits a large hard-spring effect with the bending of the film, observed as an increase of the ringing frequency. The spring constant was experimentally observed to increase by 6.25 times. The theoretical results agree well with the experimental results regarding the magnitude of the nonlinear spring constant. (C) 2013 Elsevier B.V. All rights reserved.