Design and Performance of a PZT Coriolis Vibrating Gyro (CVG)

Design and Performance of a PZT Coriolis Vibrating Gyro (CVG)
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PZT 科里奥利振动陀螺仪 (CVG) 的设计与性能

DOI:
10.1109/isaf.2006.4387870
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发表时间:
2006
期刊:
2006 15th ieee international symposium on the applications of ferroelectrics
影响因子:
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通讯作者:
B. Le Foulgoc
B. Le Foulgoc
中科院分区:
--
文献类型:
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作者:
A. Parent;Oliver Le Traon;S. Masson;B. Le Foulgoc

文献摘要

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本文提出了一种新型压电科里奥利振动陀螺仪(CVG)。确实需要集成惯性传感器(例如用于车辆姿态控制或惯性导航),ONERA(法国国家航空航天研究机构)一直在开发一种称为 VIG(振动惯性陀螺仪)的石英微机械 CVG。选择石英是因为其机械质量和温度稳定性,但传感器分辨率仍受到其低压电特性的限制。为了增强 CVG 性能,一种可能性是使用更强的压电材料(因为分辨率与压电材料性能直接相关)。由于钙钛矿铁电材料具有强压电性 - PZT 陶瓷 (d31=150pC/N) 的压电性是石英 (d11=2.3pC/N) 的数百倍 - 它们为 CVG 开发提供了新的可能性。本文介绍了由 PZT 陶瓷制成的新型单片压电 CVG 的设计、性能和分辨率。这种陀螺仪可以实现 0.2 deg/h 的分辨率。还对关键的固有材料参数进行了简要讨论。
A new piezoelectric Coriolis vibrating gyro (CVG) is presented in this article. There is a real need for integrated inertial sensors (e.g. for vehicle attitude control or inertial navigation) and ONERA (the French National Establishment for Aerospace Research) has been developing a quartz micromachined CVG called VIG (vibrating inertial gyro). Quartz was chosen in regard to its mechanical quality and temperature stability, but nevertheless the sensor resolution is limited by its low piezoelectric properties. To enhance CVG performances one possibility is to use stronger piezoelectric material (since the resolution is directly linked to piezoelectricity the material performance). As Perovskite ferroelectric materials are strongly piezoelectric - PZT ceramics (d31=150pC/N) are hundreds of times more piezoelectric than quartz (d11=2.3pC/N) -they offer new possibilities in CVG development. In this paper are presented the design, the performance and the resolution of a new monolithic piezoelectric CVG made of a PZT ceramic. Such a gyro could achieve a resolution of 0.2 deg/h. A brief discussion of key intrinsic material parameters is also made.