Transmission-Type Laser THz Emission Microscope Using a Solid Immersion Lens
Transmission-Type Laser THz Emission Microscope Using a Solid Immersion Lens
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DOI：
10.1109/jstqe.2007.913425
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发表时间：
2008-04
影响因子：
4.9
通讯作者：
Sunmi Kim;H. Murakami;M. Tonouchi
中科院分区：
文献类型：
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作者：
Sunmi Kim;H. Murakami;M. Tonouchi
激光太赫兹（THz）发射显微镜（LTEM）是近年来发展起来的一种新型半导体集成电路检测工具。对于高分辨率成像，我们演示了一个半球形的固体浸没透镜（SIL）和透射型检测模式的LTEM的组合。与反射式LTEM几何结构不同，其中探测fs激光脉冲和产生的THz发射都使用相同的光学组件，传输系统使fs激光器和THz检测光学器件的结构具有灵活性：样品入射侧的光学器件仅用于操纵fs脉冲，而传输侧的光学器件仅用于操纵THz发射。我们可以通过将物镜透镜与在780 nm处折射率n = 1.98的半球形SIL相结合来提高空间分辨率小于1.5 μ m。
A recently developed laser terahertz (THz) emission microscope (LTEM) is a new type of inspection tool for semiconductor integrated circuits by 2-D mapping of THz emission excited by femtosecond (fs) laser pulse. For high-resolution imaging, we demonstrate the combination of a hemispherical solid immersion lens (SIL) and an LTEM with transmission-type detection mode. Unlike reflective LTEM geometries, in which both the probing fs laser pulses and the generated THz emissions utilize the same optical components, the transmission system enables flexibility in the construction of both the fs laser and the THz detection optics: The optics on the incident side of the sample are used only to manipulate the fs pulses, while those on the transmission side are meant only for manipulating the THz emission. We could improve the spatial resolution by less than 1.5 mum by combining the objective lens with the hemispherical SIL with a refractive index n = 1.98 at 780 nm.