Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
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DOI：
10.1016/j.energy.2018.02.048
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发表时间：
2018
期刊：
影响因子：
9
通讯作者：
H. Madinei;H. H. Khodaparast-H.;M. Friswell;S. Adhikari
中科院分区：
文献类型：
--
作者：
H. Madinei;H. H. Khodaparast-H.;M. Friswell;S. Adhikari
本文提出在制造不确定因素存在的情况下，利用静电器件来提高MEMS压电采集器的性能。考虑了不同类型的不确定参数，并根据其实验测量的统计特性进行了随机化。已经证明，制造的不确定性在MEMS收割机导致较低的输出功率。采用蒙特卡罗仿真方法，通过微机电系统的数学模型来传递不确定性。研究发现，不确定度效应会导致两组样本。第一组样本为共振频率高于标称值的样本，第二组样本为共振频率低于标称值的样本。本文提出的装置可以通过将共振频率调谐到标称设计来补偿收割机变异性的影响。该装置由两个电极的对称排列组成，使共振频率低于其标称值。然而，在微尺度上实现精确的对称条件是不可行的。因此，由于制造变异性导致的不对称排列的影响也进行了研究。该装置包括两个拱形电极，可用于提高共振频率。
This paper proposes the use of an electrostatic device to improve the performance of MEMS piezoelectric harvesters in the presence of manufacturing uncertainties. Different types of uncertain parameters have been considered and randomised according to their experimentally measured statistical properties. It has been demonstrated that manufacturing uncertainty in MEMS harvesters results in a lower output power. Monte Carlo Simulation is used to propagate uncertainty through the MEMS mathematical model. It has been found that the uncertainty effects can result in two sets of samples. The first set of samples are those with resonance frequency higher than nominal values and the second set includes samples with resonance frequencies lower than the nominal value. The device proposed in this paper can compensate for the effects of variability in the harvester by tuning the resonance frequency to the nominal design. This device is composed of a symmetrical arrangement of two electrodes, which decrease the resonance frequency from its nominal value. However, achieving precise symmetrical conditions in the device on a micro-scale is not feasible. Therefore, the effects of an unsymmetrical arrangement due to manufacturing variability are also investigated. The device includes two arch-shaped electrodes that can be used to increase the resonance frequency.