Analytical, computational, and experimental study of thermoviscous acoustic damping in perforated micro-electro-mechanical systems with flexible diaphragm.
Analytical, computational, and experimental study of thermoviscous acoustic damping in perforated micro-electro-mechanical systems with flexible diaphragm.
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具有柔性隔膜的穿孔微机电系统中热粘性声阻尼的分析、计算和实验研究。
DOI：
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发表时间：
2021
影响因子：
2.4
通讯作者：
C. Hickey
中科院分区：
文献类型：
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作者：
V. Naderyan;R. Raspet;C. Hickey
建立了柔性膜片微机电系统的阻尼和弹簧力系数解析模型。该模型基于低频降频法，考虑了热损失、粘损失以及惯性和压缩效应。具体而言，推导了具有开边和闭边边界的箝位膜片的圆形MEMS的解决方案。将圆形夹紧膜片的偏转功能纳入热粘性声学（TA）公式中，以考虑膜片柔性的影响。同时利用TA有限元分析（FEA）建立计算模型。在较宽的参数范围和频率范围内，分析结果与有限元结果吻合较好。论证了膜片柔性对实际微机电系统阻尼影响的重要性。通过测量圆形MEMS的阻尼系数来验证模型的有效性。实验结果与模型结果之间的微小差异（小于6%）验证了所提出模型的准确性。该分析模型可应用于具有各种几何形状和边界条件的微机电系统。
An analytical model for the damping and spring force coefficients of micro-electro-mechanical systems (MEMS) with a flexible diaphragm is developed. The model is based on the low reduced-frequency method, which includes thermal and viscous losses as well as inertial and compressibility effects. Specifically, the solutions are derived for circular MEMS with a clamped diaphragm with both open-edge and closed-edge boundaries. The deflection function of the circular clamped diaphragm is incorporated into the thermoviscous acoustic (TA) formulation to take into account the effect of the flexibility of the diaphragm. TA finite-element analysis (FEA) is also used to develop a computational model. The analytical results are in good agreement with the FEA results for a wide range of parameters and frequencies. The significance of the effect of the flexibility of the diaphragm on damping for actual MEMS is demonstrated. Measurements of the damping coefficient of circular MEMS are conducted for experimental validation of the presented model. The small difference between the experimental results and the results from the model (less than 6%) validates the accuracy of the presented model. The proposed analytical model can be applied to MEMS with various geometries and boundary conditions.