Polymerization of Room-Temperature Ionic Liquid Monomers by Electron Beam Irradiation with the Aim of Fabricating Three-Dimensional Micropolymer/Nanopolymer Structures
Polymerization of Room-Temperature Ionic Liquid Monomers by Electron Beam Irradiation with the Aim of Fabricating Three-Dimensional Micropolymer/Nanopolymer Structures
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DOI：
10.1021/la503252p
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发表时间：
2015-04-14
期刊：
影响因子：
3.9
通讯作者：
Kuwabata, S.
中科院分区：
文献类型：
--
作者：
Minamimoto, H.;Irie, H.;Kuwabata, S.
提出了一种在硅衬底上以室温离子液体（RTIL）为基材，利用电子束（EB）的图像化辐照制备微、纳米级聚合物结构的新方法。RTIL， 1-烯丙基-3-乙基咪唑双（（三氟甲烷）磺酰）酰胺的极低蒸气压，允许它被引入电子束装置的高真空室，在纳米区域进行辐射诱导聚合。我们制备了各种三维（3D）微/纳米聚合物结构，其高纵横比高达5，分辨率为亚100纳米。此外，通过记录FT-IR光谱和杨氏模量，研究了辐照剂量和束流对沉积聚合物理化性质的影响。有趣的是，即使样品以类似的方式辐照，所获得的结构的整体形状也与我们最近使用聚焦离子束（FIB）制备的结构不同。这可能是由于在量子束轨迹的理论计算的基础上讨论的两种类型的光束之间的不同传输。本研究中获得的感知为微/纳米结构的制备提供了简便的方法。
A novel method for fabricating microsized and nanosized polymer structures from a room-temperature ionic liquid (RTIL) on a Si substrate was developed by the patterned irradiation of an electron beam (EB). An extremely low vapor pressure of the RTIL, 1-allyl-3-ethylimidazolium bis((trifluoromethane)sulfonyl)amide, allows it to be introduced into the high-vacuum chamber of an electron beam apparatus to conduct a radiation-induced polymerization in the nanoregion. We prepared various three-dimensional (3D) micro/nanopolymer structures having high aspect ratios of up to 5 with a resolution of sub-100 nm. In addition, the effects of the irradiation dose and beam current on the physicochemical properties of the deposited polymers were investigated by recording the FT-IR spectra and Youngs modulus. Interestingly, the overall shapes of the obtained structures were different from those prepared in our recent study using a focused ion beam (FIB) even if the samples were irradiated in a similar manner. This may be due to the different transmission between the two types of beams as discussed on the basis of the theoretical calculations of the quantum beam trajectories. Perceptions obtained in this study provide facile preparation procedures for the micro/nanostructures.