RF MEMS Metal-Contact Switches With mN-Contact and Restoring Forces and Low Process Sensitivity
RF MEMS Metal-Contact Switches With mN-Contact and Restoring Forces and Low Process Sensitivity
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DOI：
10.1109/tmtt.2010.2097693
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发表时间：
2011-05-01
影响因子：
4.3
通讯作者：
Rebeiz, Gabriel M.
中科院分区：
文献类型：
--
作者：
Patel, Chirag D.;Rebeiz, Gabriel M.
本文提出了一种基于系留悬臂拓扑的静电射频微机电系统 (MEMS) 金属接触开关。使用系绳导致设计对应力梯度、双轴应力和温度的敏感性较低。开关尺寸为 160 190 μ m(2)，基于带有 Au/Ru 触点的 8 μm 厚金悬臂梁，在高电阻率硅基板上实现，在 80-90 V 时产生 0.8-1.2 mN 的总接触力、0.5 mN 的恢复力、61 V 的吸合电压、24 fF 的上态电容以及 24 fF 的驱动电压。的时间 6.4 秒。该器件在开放实验室环境（未封装）中在 90-100 V 电压下实现了 2.4 +/- 1.4 Omega 至 1.8 +/- 0.6 Omega 的开关电阻。该设计有潜力在自动化测试设备和高性能交换网络等应用领域取代传统电磁继电器。
This paper presents an electrostatic RF microelectromechanical systems (MEMS) metal contact switch based on a tethered cantilever topology. The use of tethers results in a design that has low sensitivity to stress gradients, biaxial stresses, and temperature. A switch with a footprint of 160 190 mu m(2) and based on a 8-mu m-thick gold cantilever with an Au/Ru contact is implemented on a high-resistivity silicon substrate and results in a total contact force of 0.8-1.2 mN at 80-90 V, a restoring force of 0.5 mN, a pull-in voltage of 61 V, an up-state capacitance of 24 fF, and an actuation time of 6.4 s. The device achieves a switch resistance of 2.4 +/- 1.4 Omega to 1.8 +/- 0.6 Omega at 90-100 V in open laboratory environments (nonpackaged). This design has the potential to replace conventional electromagnetic relays in application areas such as automated testing equipment and high-performance switching networks.