Toward more efficient fabrication of high-density 2D VCSEL arrays for spatial redundancy and/or multi-level signal communication
Toward more efficient fabrication of high-density 2D VCSEL arrays for spatial redundancy and/or multi-level signal communication
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DOI：
10.1117/12.662121
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发表时间：
2006-04
期刊：
影响因子：
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通讯作者：
H. Roscher;P. Gerlach;F. Khan;A. Kroner;M. Stach;A. Weigl;R. Michalzik
中科院分区：
文献类型：
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作者：
H. Roscher;P. Gerlach;F. Khan;A. Kroner;M. Stach;A. Weigl;R. Michalzik
我们提出了倒装芯片连接的高速垂直腔面发射激光器在2-D阵列与创纪录的高细胞内的包装密度。综述了VCSEL阵列技术在改善热性能和提高制造效率方面的进展，并指出了在这些器件中引入自对准功能的可能性。本文讨论了窄间距楔形VCSEL的结构，给出了其静态和动态特性，并通过近场测量研究了其模态结构。激光器倒装芯片键合到一个基于硅的测试平台表现出3-dB和10-dB的带宽分别为7.7 GHz和9.8 GHz。给出了开放的12.5Gbit/s两级眼图。我们讨论了使用高封装密度的阵列可以在其生命周期中提供的数据吞吐量的总量的增加。一种这样的方法是为每个光纤通道提供多达两个备用VCSEL，这可以通过光源的冗余来延长并行发射机的寿命。另一种是通过在每50 μm芯径多模光纤中使用多个VCSEL来产生更复杂的信号，从而提高信息密度。提出了一种利用每根光纤三个垂直腔面发射激光器产生光域四电平信号的新方案。第一个实验表明，使用两个垂直腔面发射激光器对接耦合到同一个标准的玻璃纤维，每个调制与两个级别的信号，以产生四个级别的信号在光接收器。在三个器件中的一个VCSEL的四电平直接调制产生了第一个20.6 Gbit/s（10.3 Gsymbols/s）的四电平眼，留下两个VCSEL作为备用源。
We present flip-chip attached high-speed VCSELs in 2-D arrays with record-high intra-cell packing densities. The advances of VCSEL array technology toward improved thermal performance and more efficient fabrication are reviewed, and the introduction of self-aligned features to these devices is pointed out. The structure of close-spaced wedge-shaped VCSELs is discussed and their static and dynamic characteristics are presented including an examination of the modal structure by near-field measurements. The lasers flip-chip bonded to a silicon-based test platform exhibit 3-dB and 10-dB bandwidths of 7.7 GHz and 9.8 GHz, respectively. Open 12.5 Gbit/s two-level eye patterns are demonstrated. We discuss the uses of high packing densities for the increase of the total amount of data throughput an array can deliver in the course of its life. One such approach is to provide up to two backup VCSELs per fiber channel that can extend the lifetimes of parallel transmitters through redundancy of light sources. Another is to increase the information density by using multiple VCSELs per 50 μm core diameter multimode fiber to generate more complex signals. A novel scheme using three butt-coupled VCSELs per fiber for the generation of four-level signals in the optical domain is proposed. First experiments are demonstrated using two VCSELs butt-coupled to the same standard glass fiber, each modulated with two-level signals to produce four-level signals at the photoreceiver. A four-level direct modulation of one VCSEL within a triple of devices produced first 20.6 Gbit/s (10.3 Gsymbols/s) four-level eyes, leaving two VCSELs as backup sources.