Fluorination of carbon nanotubes in CF4 plasma

Fluorination of carbon nanotubes in CF4 plasma
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DOI:
10.1063/1.1611621
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发表时间:
2003-09
影响因子:
4
通讯作者:
N. Plank;Liudi Jiang;R. Cheung
N. Plank;Liudi Jiang;R. Cheung
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
N. Plank;Liudi Jiang;R. Cheung

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研究了CF 4等离子体对单壁碳纳米管的作用。拉曼光谱结果表明,随着等离子体中气体的流速和等离子体中暴露时间的增加,CNT已经获得了更多与功能化相关的无序sp3键。扫描电子显微镜图像表明,碳纳米管已被保存后,CF 4等离子体暴露。X射线光电子能谱提供了在CF 4等离子体暴露后CNT样品上的碳-氟键(C-F)的证据。在CF 4暴露后,半离子和共价C-F键在CNT上是普遍的,其中半离子与共价C-F键的强度比随着CF 4的流速和在CF 4等离子体中的暴露时间的增加而降低。
The effect of CF4 gaseous plasma exposure to single-wall carbon nanotubes (CNTs) has been studied. Raman spectroscopy results show that CNTs have gained more disordered sp3 bonds associated with functionalization, as both the flow rates of gas in the plasma and exposure time in the plasma are increased. Scanning electron microscopy images indicate the CNTs have been preserved after CF4 plasma exposure. X-ray photoelectron spectroscopy provides evidence of carbon to fluorine bonds (C–F) on the CNTs samples after CF4 plasma exposure. Semi-ionic and covalent C–F bonds are prevalent on the CNTs after CF4 exposure with the intensity ratio of the semi-ionic to covalent C–F bond decreasing as the flow rate of CF4 and exposure time in the CF4 plasma is increased.