Character Diagnosis for Surface-Wave Plasmas Excited by Surface Plasmon Polaritons
Character Diagnosis for Surface-Wave Plasmas Excited by Surface Plasmon Polaritons
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DOI：
10.1088/1009-0630/14/8/13
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发表时间：
2012-08
影响因子：
1.7
通讯作者：
Chen Zhaoquan;Xia Guang-qing;Liu Ming-hai;H. Yelin;Zheng Xiao-liang;Li Ping;Zhou Qi-yan;Huang Xiwei
中科院分区：
文献类型：
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作者：
Chen Zhaoquan;Xia Guang-qing;Liu Ming-hai;H. Yelin;Zheng Xiao-liang;Li Ping;Zhou Qi-yan;Huang Xiwei
基于表面等离子体激元的共振激发，诊断了平面型表面波等离子体的等离子体参数。通过改变放电气压和入射功率，得到了等离子体参数的分布。测量的实验结果表明，加热层附近的等离子体是由表面等离子体粒子的表面波激发的，而位于下游的等离子体则是由扩散激发的。此外，高频振荡的影响在产生具有双麦克斯韦电子能量分布的表面等离子体粒子中起着重要作用。
The plasma parameters of planar-type surface-wave plasmas (SWPs) are diagnosed based on the resonant excitation of surface plasmon polaritons (SPPs). The plasma parameter distributions are obtained by changing the discharge conditions of gas pressure and incident power. The measured experimental results show that the plasma near the heating layer is excited by surface waves of SPPs while the plasma located downstream originates from diffusion Moreover, the influence of high-frequency oscillations plays a significant role in producing the proposed SWPs with bi-Maxwellian electron energy distributions.