Large tuning range analog and multi-bit MEMS varactors
Large tuning range analog and multi-bit MEMS varactors
复制标题
大调谐范围模拟和多位 MEMS 变容二极管
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
C. Keast
中科院分区：
文献类型：
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作者：
J. Muldavin;C. Bozler;S. Rabe;C. Keast
本文介绍了各种用于可调谐电路和滤波器的模拟和多位射频MEMS变容器。新颖使用多个下拉电极覆盖厚电介质允许模拟和数字型控制和长时间按住。提出了一种可用调谐范围接近7:1、开关范围优于80:1的模拟变容管、多态变容开关和4位电容组。
This paper presents a variety of analog and multi-bit RF MEMS varactors for use in tunable circuits and filters. Novel use of multiple pull-down electrodes covered with thick dielectrics allow for analog and digital-type control and long-hold down times. An analog varactor with nearly 7:1 usable tuning range and better than 80:1 switching range, a multi-state varactor-switch and a 4 bit capacitor bank are presented.