Investigation of conducting nano-structures on ta-C films made by FIB lithography
Investigation of conducting nano-structures on ta-C films made by FIB lithography
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DOI:
10.1016/j.nimb.2011.08.057
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发表时间:
2012-07
影响因子:
1.3
通讯作者:
P. Philipp;L. Bischoff
中科院分区:
文献类型:
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作者:
P. Philipp;L. Bischoff