Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer
Error-compensating phase-shifting algorithm for surface shape measurement of transparent plate using wavelength-tuning Fizeau interferometer
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DOI：
10.1016/j.optlaseng.2016.06.021
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发表时间：
2016-11
影响因子：
4.6
通讯作者：
Yangjin Kim;K. Hibino;N. Sugita;M. Mitsuishi
中科院分区：
文献类型：
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作者：
Yangjin Kim;K. Hibino;N. Sugita;M. Mitsuishi
在用波长调谐Fizeau干涉法测量透明样品的表面形状时，计算的相位不仅取决于相移误差，而且取决于高次谐波和相移误差之间的耦合误差。本文推导了一种13个采样的相移算法，该算法可以补偿相移的误校和一阶非线性、耦合误差和强度的偏置调制，并对二次反射谐波效应有很强的抑制作用。关于频域中的傅立叶表示，估计了13个样本算法的特性。讨论了用13采样算法进行测量的相位误差，并与用其他传统相移算法得到的测量结果进行了比较。最后，给出了用波长调谐菲佐干涉仪和13样本算法得到的熔融石英楔形板的表面形状。实验结果表明，透明熔石英板的面形测量精度为3 nm。通过比较使用其他传统算法计算的串扰噪声的幅度，讨论了测量的精度。
When measuring the surface shape of a transparent sample using wavelength-tuning Fizeau interferometry, the calculated phase is critically determined by not only phase-shift errors, but also by coupling errors between higher harmonics and phase-shift errors. This paper presents the derivation of a13-sample phase-shifting algorithm that can compensate for miscalibration and first-order nonlinearity of phase shift, coupling errors, and bias modulation of the intensity, and has strong suppression of the second reflective harmonic effect. The characteristics of the13-sample algorithm are estimated with respect to Fourier representation in the frequency domain. The phase error of measurement performed using the13-sample algorithm is discussed and compared with those of measurements obtained using other conventional phase-shifting algorithms. Finally, the surface shape of a fused silica wedge plate obtained using a wavelength tuning Fizeau interferometer and the13-sample algorithm are presented. The experimental results indicate that the surface shape measurement accuracy for a transparent fused silica plate is 3 nm. The accuracy of the measurement is discussed by comparing the amplitudes of the crosstalk noise calculated using other conventional algorithms.