Determining thermal expansion coefficients of thin films using micromachined cantilevers
Determining thermal expansion coefficients of thin films using micromachined cantilevers
复制标题
使用微机械悬臂确定薄膜的热膨胀系数
DOI：
10.1016/s0924-4247(99)00019-9
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
Chun
中科院分区：
文献类型：
--
作者：
W. Fang;Hsin C Tsai;Chun
在这项研究中，薄膜的热膨胀系数（CTE）进行了研究，通过分析和实验方法，使用微机械光束。利用单层和双层微机械悬臂梁（微悬臂梁）测量薄膜的热膨胀。结果表明，单层和双层微机械悬臂梁在温度变化后均会产生离面变形。因此，薄膜材料的热膨胀可以使用光学干涉技术在这些热变形的微悬臂梁上确定。所提出的技术的贡献是，它们可以被用来提高CTE测量的灵敏度和准确性。此外，薄膜CTE在整个基板上的分布也可以通过所提出的方法来确定。由于本研究所采用的微悬臂梁结构非常简单，因此简化了建模和制造过程。因此，所提出的技术可以用于补充用于确定薄膜CTE的其他技术。
In this research, the coefficient of thermal expansion (CTE) of thin films was studied through analytical and experimental approaches using micromachined beams. Both single layer and bilayer micromachined cantilevers (microcantilevers) were exploited in measuring the thermal expansion of the thin films. It was obtained that both single and bilayer micromachined cantilevers would exhibit an out of plane deflection after subjected to temperature changes. Thus the thermal expansion of thin film materials can be determined using optical interferometric techniques on these heat-deformed microcantilevers. The contributions of the proposed techniques are that they can be used to increase the sensitivity and accuracy of CTE measurements. Furthermore, the distribution of the thin film CTE across the entire substrate can also be determined through the proposed approaches. Since the microcantilever structure used in this study is very simple, both modeling and fabrication processes are simplified. Thus the proposed technique can be applied to supplement other techniques used in determining the CTE of thin films.