Alumina film sputter deposition on mold steel by large-area electron beam irradiation
Alumina film sputter deposition on mold steel by large-area electron beam irradiation
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DOI：
10.1007/s40684-020-00243-1
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发表时间：
2020-07
影响因子：
4.2
通讯作者：
T. Shinonaga;M. Takata;Motohiro Inoue;A. Okada
中科院分区：
文献类型：
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作者：
T. Shinonaga;M. Takata;Motohiro Inoue;A. Okada
在大面积EB照射期间，由于其高能量密度，等离子体的产生通过电子与基板表面上方的蒸发的工件材料的碰撞来确认。当靶材设置在衬底表面附近时，这种现象会引起靶材的溅射。因此，有可能通过大面积EB照射在基板表面上涂覆靶材料。大面积电子束溅射沉积靶材的同时，工件表面发生熔化和再凝固，提高了涂层与工件表面的结合强度。本文提出了一种利用大面积电子束辐照靶管溅射陶瓷涂层的新方法。将氧化铝陶瓷靶管置于模具钢基体表面，大面积电子束照射到基体表面。可以在基片表面形成几微米厚的氧化铝膜。此外，通过改变支撑氧化铝靶管的夹具的材料性质，探讨了成膜机理。分析了电子束辐照时基片表面产生的等离子体光谱。结果表明，夹具的磁性能对成膜有很大的影响。此外，在处理过程中在工件表面上产生的等离子体的主要成分是钢的成分在低数量的EB照射的情况下，而更多的氧化铝成分作为膜被检测到在高数量的EB照射的情况下。
During the large-area EB irradiation, plasma generation is confirmed by collision of electrons with vaporized workpiece materials above the substrate surface due to its high energy density. This phenomenon would cause the sputtering of target material when it is set near the substrate surface. Thus, there is a possibility for coating a target material on the substrate surface by the large-area EB irradiation. The simultaneous sputter deposition of target material with melting and resolidification of workpiece surface by the large-area EB would improve the adhesion strength between the coated film and the workpiece surface. In this study, a new ceramics coating method with sputtering of target tube by large-area EB irradiation is proposed. Ceramic target tube made of alumina is put on the substrate surface of mold steel, and the large-area EB is irradiated to the substrate surface. The alumina film with thickness of several micro meter can be formed on the substrate surface. Moreover, the film formation mechanism is discussed by changing material property of a jig supporting the alumina target tube. The spectrum of plasma generated on the substrate surface during the EB irradiation is also analyzed. It is made clear that the magnetic property of jig greatly influences on the film formation. Furthermore, main components of plasma generated on workpiece surface during the process are components of steel in the case of low number of EB irradiation, while much more alumina component as a film is detected in the case of high number of EB irradiation.