Thermal Edge Compressor -a new idea of a pump driven by temperature field-(award lecture of 32th Kumagai award from the Vacuum Society of Japan)
Thermal Edge Compressor -a new idea of a pump driven by temperature field-(award lecture of 32th Kumagai award from the Vacuum Society of Japan)
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热边缘压缩机-温度场驱动泵的新理念-(第32届日本真空学会熊谷奖获奖演讲)
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
Sugimoto
中科院分区:
文献类型:
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作者:
H.;Sugimoto