Introduction of a co-resonant detection concept for mechanical oscillation-based sensors

Introduction of a co-resonant detection concept for mechanical oscillation-based sensors
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引入基于机械振动的传感器的共谐振检测概念

DOI:
10.1088/0957-4484/26/33/335501
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发表时间:
2015
期刊:
影响因子:
3.5
通讯作者:
T. Mühl
T. Mühl
中科院分区:
材料科学3区
文献类型:
--
作者:
C. F. Reiche;J. Körner;B. Büchner;T. Mühl

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以其谐振频率或接近其谐振频率驱动的微机电和纳机电振荡器在许多科学和技术领域用作传感器。振荡器的有效弹簧常数和/或质量的减小对于传感器的灵敏度的增加具有很大的潜力。这通常伴随着空间维度的减少,这在大多数情况下需要更复杂的检测方法。通过分析一个简单的非对称耦合谐振子模型的复杂行为,我们提出了一种新的传感器的概念,结合了更大和更小的振荡器的优点,即易于检测和高灵敏度。这个概念是基于匹配两个非常不同的振荡器的谐振频率。为了支持我们的理论考虑,我们提出了这样的传感器和相应的实验数据的实验实现,验证了几个数量级的大量信号增强。
Micro-and nanoelectromechanical oscillators driven at or close to their resonance frequency are used as sensors in many fields of science and technology. A decrease in the oscillator's effective spring constant and/or mass holds great potential for an increase in the sensor's sensitivity. This is usually accompanied by a reduction in spatial dimensions, which in most cases requires more complex detection methods. By analyzing the complex behavior of a simple asymmetric coupled harmonic oscillator model we propose a novel sensor concept which combines the advantages of bigger and smaller oscillators, ie ease of detection and high sensitivity. The concept is based on matching the resonance frequencies of two otherwise very different oscillators. To support our theoretical considerations, we present an experimental implementation of such a sensor and respective experimental data, verifying a substantial signal enhancement by several orders of magnitude.