Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
Characterization of High-Speed Microactuator Utilizing Shape Memory Alloy Thin Films
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DOI：
10.4028/www.scientific.net/msf.475-479.2037
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发表时间：
2005-01
期刊：
影响因子：
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通讯作者：
M. Tomozawa;K. Okutsu;H. Y. Kim;S. Miyazaki
中科院分区：
文献类型：
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作者：
M. Tomozawa;K. Okutsu;H. Y. Kim;S. Miyazaki
研究了两种基于Ti-Ni基薄膜的高速微驱动器的动态驱动特性。一种类型是利用具有高相变温度的Ti-Ni-Pd薄膜的微致动器。微致动器的冷却速度随着相变温差和大气温差的增大而增大，相变温度的升高有效地提高了微致动器的致动响应。另一种是利用钛镍薄膜的R相变制成的微驱动器，它具有较窄的相变温度滞后。R相变的窄相变温度滞后是提高驱动响应的有效途径。这两种类型的执行器在高响应应用中都很有前途。利用Ti-Ni-Pd薄膜的马氏体相变和Ti-Ni薄膜的R相变，两种微致动器的工作频率都达到了100 Hz。
Dynamic actuation properties of two types of high-speed microactuators utilizing Ti-Ni-based thin films were investigated. One type is a microactuator utilizing a Ti-Ni-Pd thin film which has high transformation temperatures. Cooling rate of a microactuator increases with increasing temperature difference between transformation and atmosphere temperatures, thus the increase in transformation temperature is effective to increase the actuation response. The other type is a microactuator using R-phase transformation of a Ti-Ni thin film which has a narrow transformation temperature hysteresis. The narrow transformation temperature hysteresis of the R-phase transformation is effective to increase the actuation response. Both types of actuators are promising for high response applications. The working frequency of the microactuators reached 100Hz in the two types of microactuators utilizing the martensitic transformation of the Ti-Ni-Pd thin film and the R-phase transformation of the Ti-Ni thin film.