Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature
Formation of crystalline iron oxide nanostructures by electron beam-induced deposition at room temperature
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DOI：
10.1088/0957-4484/17/15/003
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发表时间：
2006-08-14
期刊：
影响因子：
3.5
通讯作者：
Furuya, K.
中科院分区：
文献类型：
--
作者：
Shimojo, M.;Takeguchi, M.;Furuya, K.
利用有机金属前驱体的电子束诱导沉积（EBID）是一种很有前途的纳米制造技术，但沉积物主要限于碳质材料。在这项研究中，水和五羰基铁的蒸气在精确控制下混合，并将混合物用作EBID的前体。我们已经成功地实现了在室温下直接形成的Fe3O4纳米结构。这将有助于扩大EBID可以生产的材料范围。
Electron beam-induced deposition (EBID) using organometallic precursors is a promising technique for nanometre-sized fabrication, but the deposits have been mostly limited to carbonaceous materials. In this study, vapours of water and iron pentacarbonyl were mixed with precise control and the mixture used as a precursor for EBID. We have succeeded in achieving direct formation of Fe3O4 nanostructures at room temperature. This will contribute to broadening the range of materials that can be produced by EBID.