High finesse opto-mechanical cavity with a movable thirty-micron-size mirror
High finesse opto-mechanical cavity with a movable thirty-micron-size mirror
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DOI：
10.1103/physrevlett.96.173901
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发表时间：
2006-05-05
影响因子：
8.6
通讯作者：
Bouwmeester, D
中科院分区：
文献类型：
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作者：
Kleckner, D;Marshall, W;Bouwmeester, D
我们报告的高精细度的微光学机械系统的演示，并确定潜在的应用范围从光学冷却弱力检测大规模量子叠加。该系统由一个高品质的30 μ m直径的平面介质镜切割从一个较大的基板与聚焦离子束和连接到一个原子力显微镜悬臂。腔衰荡测量进行了25毫米长的法布里-珀罗腔与30 μ m的镜子在一端显示的光学精细度为2100。数值计算表明，精细度不是衍射限制，更高的数量级的精细度应该是可能的。在低于10（-3）mbar的压力下，对于带有反射镜的悬臂梁，证明了大于10（5）的机械品质因数。
We report on the demonstration of a high finesse micro-optomechanical system and identify potential applications ranging from optical cooling to weak force detection to massive quantum superpositions. The system consists of a high quality 30 mu m diameter flat dielectric mirror cut from a larger substrate with a focused ion beam and attached to an atomic force microscope cantilever. Cavity ring-down measurements performed on a 25 mm long Fabry-Perot cavity with the 30 mu m mirror at one end show an optical finesse of 2100. Numerical calculations show that the finesse is not diffraction limited and that orders of magnitude higher finesse should be possible. A mechanical quality factor of more than 10(5) at pressures below 10(-3) mbar is demonstrated for the cantilever with a mirror attached.