Electrochemical studies of carbon films from pyrolyzed photoresist
Electrochemical studies of carbon films from pyrolyzed photoresist
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DOI：
10.1149/1.1838636
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发表时间：
1998-07-01
影响因子：
3.9
通讯作者：
White, B
中科院分区：
文献类型：
--
作者：
Kim, J;Song, X;White, B
通过在 600 至 1100 摄氏度的温度下热解硅片上的光刻胶来制备碳膜电极。通过扫描和透射电子显微镜、热重分析和四点探针电阻率测量来表征碳膜的物理性质。通过循环伏安法研究碳膜的电化学性能，观察Fe(CN)(6)(4-)/Fe(CN)(6)(3-)氧化还原电对的动力学。在大于或等于700℃的温度下制备的碳膜电极表现出与玻碳相似的电化学行为。在较高热解温度下制备的碳膜获得了更好的电催化性能，这归因于不同热解温度下的不同膜组成。碳膜电极的电化学性能非常稳定，即使在室温空气中储存3个月后也表现出可重现的行为。
Carbon film electrodes were prepared by pyrolysis of photoresists on silicon-wafers at temperatures ranging from 600 to 1100 degrees C. The physical properties of the carbon films were characterized by scanning and transmission electron microscopies, thermal gravimetric analysis, and four-point probe electrical resistivity measurements. The electrochemical properties of the carbon films were investigated by cyclic voltammetry to observe the kinetics of the Fe(CN)(6)(4-)/Fe(CN)(6)(3-) redox couple. The carbon film electrodes prepared at temperatures greater than or equal to 700 degrees C showed electrochemical behavior Similar to that of glassy carbon. Better electrocatalytic behavior was obtained with carbon films prepared at the higher pyrolysis temperatures which is attributed to different film compositions at different pyrolysis temperatures. The electrochemical properties of the:carbon film electrodes are very stable, exhibiting reproducible behavior even after storing at room temperature in air for 3 months.