Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer
Fabrication of crystalline membranes oriented in the (111) plane in a (100) silicon wafer
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DOI：
10.1016/s0167-9317(03)00107-2
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发表时间：
2003-06-01
影响因子：
2.3
通讯作者：
Sarro, PM
中科院分区：
文献类型：
--
作者：
Venstra, WJ;Sarro, PM
采用各向异性湿法腐蚀(100)硅片的正面和背面，制备出(111)晶面取向的自支撑晶膜。膜的有效面积约为十分之几毫米，而厚度从几百微米到不到一微米不等。制作过程需要两个掩模和一个湿法蚀刻。利用聚焦离子束从膜上球磨出具有(111)取向的悬臂梁。我们提出了将(111)取向硅膜作为过滤元件应用于微流控系统。在{111}面上取向的悬臂梁可以作为(生物)化学传感器结构，可以集成在介质通道中。(C)2003 Elsevier Science B.V.保留所有权利。
Anisotropic wet etching on the front and backside of a (100) silicon wafer is applied to fabricate free standing crystalline membranes oriented in the (111) plane. The effective area of the membranes is in the order of several tenths of a millimeter, whereas thickness ranges from several hundreds of microns down to less than a micron. The fabrication process requires two masks and a wet etch. Cantilevers with (111) orientation were milled from the membranes by means of a Focused Ion Beam. We propose the application of (111) oriented silicon membranes as filtration elements in a microfluidic system. Cantilevers oriented in {111} planes can be applied as (bio-) chemical sensor structures that can be integrated in the medium channel. (C) 2003 Elsevier Science B.V. All rights reserved.