Isochronal annealing study of deep levels in hydrogen implanted p-type 4H-SiC

Isochronal annealing study of deep levels in hydrogen implanted p-type 4H-SiC
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氢注入p型4H-SiC深能级等时退火研究

DOI:
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发表时间:
2007
期刊:
Materials Science Forum 556-557
影响因子:
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通讯作者:
G. Alfieri and T. Kimoto
G. Alfieri and T. Kimoto
中科院分区:
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文献类型:
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作者:
Zhao;H. B.;Guan;G;Matsuda;M.;Paul-Prasanth Bindhu & Nagahama;Y.;G. Alfieri and T. Kimoto

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