Multi-channel absolute distance measurement system with sub ppm-accuracy and 20 m range using frequency scanning interferometry and gas absorption cells
Multi-channel absolute distance measurement system with sub ppm-accuracy and 20 m range using frequency scanning interferometry and gas absorption cells
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DOI：
10.1364/oe.22.024869
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发表时间：
2014-10-06
期刊：
影响因子：
3.8
通讯作者：
Warden, Matthew S.
中科院分区：
文献类型：
--
作者：
Dale, John;Hughes, Ben;Warden, Matthew S.
我们提出了一种使用频率扫描干涉术（FSI）的绝对距离测量系统的实现。该技术被称为动态FSI，使用两个频率扫描激光器、气体吸收池和参考干涉仪来确定一个或多个测量干涉仪的未知光程长度差（OPD）。气体吸收池是测量系统的长度基准，通过了解其吸收特性的频率，可追溯到国际标准。测量干涉仪的OPD可以在测量期间变化，并且以系统的采样率（在这里描述的系统中为2.77MHz）测量变化。该系统被证明可以测量0.2 m到20 m的距离，在2 sigma水平（k = 2）下的组合相对不确定度为0.41 x 10（-6）。将示出的是，在扫描内，测量干涉仪的OPD的变化可以被确定为40 nm的分辨率。(C)2014年美国光学学会
We present an implementation of an absolute distance measurement system which uses frequency scanning interferometry (FSI). The technique, referred to as dynamic FSI, uses two frequency scanning lasers, a gas absorption cell and a reference interferometer to determine the unknown optical path length difference (OPD) of one or many measurement interferometers. The gas absorption cell is the length reference for the measurement system and is traceable to international standards through knowledge of the frequencies of its absorption features. The OPD of the measurement interferometers can vary during the measurement and the variation is measured at the sampling rate of the system (2.77 MHz in the system described here). The system is shown to measure distances from 0.2 m to 20 m with a combined relative uncertainty of 0.41 x 10(-6) at the two sigma level (k = 2). It will be shown that within a scan the change in OPD of the measurement interferometer can be determined to a resolution of 40 nm. (C) 2014 Optical Society of America