Linear and nonlinear equivalent circuit modeling of CMUTs
Linear and nonlinear equivalent circuit modeling of CMUTs
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DOI：
10.1109/tuffc.2005.1563260
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发表时间：
2005-12-01
影响因子：
3.6
通讯作者：
Eccardt, PC
中科院分区：
文献类型：
--
作者：
Lohfink, A;Eccardt, PC
利用活塞辐射器和平板电容理论，电容式微机械超声换能器（CMUT）膜单元可以用一维模型参数来描述。本文详细介绍了一种新的方法，推导出一个1-D模型的CMUT阵列从有限元方法（FEM）模拟。一个单一的CMUT膜细胞的几个静态和谐波有限元分析是足够的，以获得一个等效活塞的机械和电气参数作为移动部分的细胞面积。对于一个阵列的并行驱动的细胞，声学参数推导出作为一个复杂的机械流体阻抗，取决于膜的形状形式。作为主要优点，与FEM模拟相比，CMUT的非线性行为可以更容易和更快地被研究，例如，用于根据输入信号设计最大适用电压。一维参数模型可以轻松描述空气和流体中的CMUT行为，并简化了对由FEM或传输线矩阵（TLM）模型表示的连接流体内的波传播的研究。
Using piston radiator and plate capacitance theory capacitive micromachined ultrasound transducers (CMUT) membrane cells can be described by one-dimensional (1-D) model parameters. This paper describes in detail a new method, which derives a 1-D model for CMUT arrays from finite-element methods (FEM) simulations. A few static and harmonic FEM analyses of a single CMUT membrane cell are sufficient to derive the mechanical and electrical parameters of an equivalent piston as the moving part of the cell area. For an array of parallel-driven cells, the acoustic parameters are derived as a complex mechanical fluid impedance, depending on the membrane shape form. As a main advantage, the nonlinear behavior of the CMUT can be investigated much easier and faster compared to FEM simulations, e.g., for a design of the maximum applicable voltage depending on the input signal.The 1-D parameter model allows an easy description of the CMUT behavior in air and fluids and simplifies the investigation of wave propagation within the connecting fluid represented by FEM or transmission line matrix (TLM) models.