Scanning photoelectron spectromicroscope based on coherent vacuum ultraviolet radiation
Scanning photoelectron spectromicroscope based on coherent vacuum ultraviolet radiation
复制标题
基于相干真空紫外辐射的扫描光电子能谱显微镜
DOI：
10.1063/1.1142232
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发表时间：
1991
影响因子：
1.6
通讯作者：
T. Kasuya
中科院分区：
文献类型：
--
作者：
T. Munakata;Etsuko Ishikawa;I. Kinoshita;T. Kasuya
描述了新开发的基于聚焦相干真空紫外 (VUV) 光的扫描光电子显微镜的设计和性能。 118 nm 波长（10.48 eV 光子能量）的 VUV 光是通过脉冲 YAG 激光的频率上转换产生的。该显微镜的特点是具有几微米的高空间分辨率，这与其优于200 meV的高能量分辨率是一致的。通过将 VUV 光聚焦到接近其衍射极限来提供空间分辨率，而光电子能量则通过高效飞行时间 (TOF) 能量分析仪来解析。点对点数据采集以及样品扫描由计算机系统控制，并且在样品的每个二维网格点处累积光谱数据。从经过处理的 Ag/Si 条带的光电发射剖面来看，空间分辨率名义上为 6 μm。本显微镜的能量分辨能力通过...证明
Design and performance of a newly developed scanning photoelectron microscope based on focused coherent vacuum ultraviolet (VUV) light are described. The VUV light at 118 nm wavelength (10.48 eV photon energy) was generated by the frequency upconversion of a pulsed YAG laser light. The microscope is characterized by its high spatial resolution of a few microns, which is consistent with its high‐energy resolution of better than 200 meV. The spatial resolution was provided by focusing the VUV light nearly to its diffraction limit, while the photoelectron energy was resolved by a high efficiency time‐of‐flight (TOF) energy analyzer. The point‐to‐point data acquisition, as well as the sample scanning, were controlled by a computer system, and the spectral data were accumulated at every two‐dimensional mesh point of the specimen. From the photoemission profile across a processed Ag/Si stripe, the spatial resolution was nominally 6 μm. The energy resolving capability of the present microscope was demonstrated b...