Evaluation of delamination strength of bonded micro-components: a nano-indenter technique combined with environmental microscopy
Evaluation of delamination strength of bonded micro-components: a nano-indenter technique combined with environmental microscopy
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DOI：
10.1109/mhs.2018.8886975
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发表时间：
2018-12
期刊：
影响因子：
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通讯作者：
Y. Takahashi;K. Kishimoto;Kimitaka Higuchi;Yuta Yamamoto;S. Arai;S. Muto
中科院分区：
文献类型：
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作者：
Y. Takahashi;K. Kishimoto;Kimitaka Higuchi;Yuta Yamamoto;S. Arai;S. Muto
采用微型机械试验机(纳米压头)和配有环境池的专用高压电子显微镜相结合的新技术，定量评价了键合微构件(Si/Cu和Cu/SiN)的抗界面起裂强度。基于聚焦离子束(FIB)的微采样技术制备了具有可控几何形状的界面边缘的微组件样品。从断裂力学的概念出发，对起裂强度进行了详细的分析。对于Si/Cu界面边缘，强度散布受边缘奇异性的影响很大：奇异性越大(楔形试件)强度散布越小。然后用两种楔形试件评价了氢气对铜/氮化硅复合材料强度的影响。结果表明，氢气的存在显著降低了材料的强度，且强度降低程度与试件形状有关。
The strength against fracture initiation from an interfacial edge in bonded micro-components (Si/Cu and Cu/SiN) is quantitatively evaluated by using a novel technique that combines a minute mechanical tester (nano-indenter) and a special high-voltage transmission electron microscope (TEM) equipped with an environmental cell. The micro-component specimens having an interfacial edge of controlled geometry are prepared by a focused-ion-beam (FIB) based micro-sampling technique. The fracture initiation strength is particularly analyzed in terms of the fracture mechanics concept. In the case of Si/Cu interfacial edge, the scatter of strength value is significantly affected by the edge singularity: the higher singularity (wedged specimen) leads to the smaller scatter of strength. The effect of gaseous hydrogen (H2) on the strength of Cu/SiN is then evaluated by two kinds of wedged specimens. It is found that the strength is eminently reduced by the existence of H2 gas and, moreover, the strength reduction is dependent on specimen shape.