Post-growth purification of Co nanostructures prepared by focused electron beam induced deposition

Post-growth purification of Co nanostructures prepared by focused electron beam induced deposition
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DOI:
10.1088/0957-4484/26/7/075301
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发表时间:
2015-02-20
期刊:
影响因子:
3.5
通讯作者:
Huth, M.
Huth, M.
中科院分区:
材料科学3区
文献类型:
--
作者:
Begun, E.;Dobrovolskiy, O. V.;Huth, M.

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在大多数情况下,通过使用有机金属前体的聚焦电子束诱导沉积(FEBID)制备的纳米结构主要包含碳基配体解离产物。对于使用这种高分辨率直写方法来制备用于各种领域(例如介观物理、微磁学、电子关联、自旋相关输运和众多应用)的纳米结构来说,这是不幸的。在这里,我们提出了一种原位清洁方法来获得纯 Co-FEBID 纳米结构。纯化过程是将加热的样品暴露在 H-2 气氛中并结合低能电子的照射。主要发现是,300 摄氏度退火、H-2 暴露和电子辐照相结合,可以从沉积的 Co-FEBID 结构开始形成致密、无碳和无氧的 Co 层,厚度降至约 20 nm。除此之外,在对后处理样品进行与温度相关的电阻测量时,我们发现了典型的金属行为。在低温磁阻和霍尔效应测量中,我们观察到铁磁行为。
In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to using this high-resolution direct-write approach for the preparation of nanostructures for various fields, such as mesoscopic physics, micromagnetism, electronic correlations, spin-dependent transport and numerous applications. Here we present an in situ cleaning approach to obtain pure Co-FEBID nanostructures. The purification procedure lies in the exposure of heated samples to a H-2 atmosphere in conjunction with the irradiation by low-energy electrons. The key finding is that the combination of annealing at 300 degrees C, H-2 exposure and electron irradiation leads to compact, carbon-and oxygen free Co layers down to a thickness of about 20 nm starting from as-deposited Co-FEBID structures. In addition to this, in temperature-dependent electrical resistance measurements on post-processed samples we find a typical metallic behavior. In low-temperature magnetoresistance and Hall effect measurements we observe ferromagnetic behavior.