Calculation of the gas flow and its effect on the plasma characteristics for a modified Grimm-type glow discharge cell
Calculation of the gas flow and its effect on the plasma characteristics for a modified Grimm-type glow discharge cell
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DOI：
10.1039/b200746k
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发表时间：
2002-01-01
影响因子：
3.4
通讯作者：
Gijbels, R
中科院分区：
文献类型：
--
作者：
Bogaerts, A;Okhrimovskyy, A;Gijbels, R
基于计算流体动力学模型，计算了格林型辉光放电电池中的氩气流量。通过添加对流作为等离子体物质的附加传输机制以及扩散和迁移，研究了其对等离子体特性的影响。在入口气体流量为100 sccm时，计算出Ar气对流速度为几十到一百m s(-1)，在气体入口和出口位置增加到几百m s(-1)。发现Ar气体原子密度在等离子体中分布稍微不均匀。计算出的 Ar 气流似乎对等离子体物质的密度分布只有很小的影响，但它们的通量受到显着影响。看来，在所研究的条件下，对流是除电子之外的所有等离子体物种的负辉光中的主要传输机制。因此，计算出的质谱仪出口处的离子通量似乎随着气体流速的增加而增加，这与实验观察结果一致。
Based on a computational fluid dynamics model, the argon gas flow in a Grimm-type glow discharge cell was calculated. Its effect on the plasma characteristics was investigated by adding convection as an additional transport mechanism of the plasma species as well as diffusion and migration. The Ar gas convection velocity, at an inlet gas flow rate of 100 sccm, was calculated to be of the order of a few tens to a hundred m s(-1), increasing to a few hundred m s(-1) at the gas inlet and outlet positions. The Ar gas atom density was found to be distributed slightly non-uniformly in the plasma. The calculated Ar gas flow appeared to have only a minor effect on the density distributions of the plasma species, but their fluxes were significantly affected. It appears that, under the conditions investigated, convection is the dominant transport mechanism in the negative glow for all plasma species, except for the electrons. Therefore, the calculated ion fluxes at the exit towards the mass spectrometer appear to increase with gas flow rate, which is in accordance with experimental observations.