A consistent definition of probe size and spatial resolution in the analytical electron microscope
A consistent definition of probe size and spatial resolution in the analytical electron microscope
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分析电子显微镜中探针尺寸和空间分辨率的一致定义
DOI：
10.1111/j.1365-2818.1987.tb02840.x
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发表时间：
1987
影响因子：
2
通讯作者：
D. Williams
中科院分区：
文献类型：
--
作者：
J. Michael;D. Williams
描述了一种用于测量场发射枪分析电子显微镜中产生的极小（<2 nm）探针尺寸的技术。该技术涉及用细探针扫描小型定向氧化镁立方体的边缘。开发了强度分布的数学描述，并显示了其与探针尺寸的各种定义的关系。然后将实验测量的探针尺寸以一致的方式与光束展宽计算和实验测量相结合。这种方法首次对薄箔中 X 射线微量分析的空间分辨率进行了自洽定义。
A technique for measuring the extremely small (<2 nm) probe sizes generated in a field emission gun analytical electron microscope is described. The technique involves scanning the fine probe across the edge of small oriented MgO cubes. A mathematical description of the intensity profiles is developed and it is shown how this relates to various definitions of the probe size. The experimentally measured probe sizes are then combined in a consistent manner with both beam broadening calculations and experimental measurements. This approach results in the first self‐consistent definition of the spatial resolution of X‐ray microanalysis in thin foils.